Semiconductor devices. Micro-electromechanical devices - Test method for Poisson's ratio of thin film MEMS materials Ingestion-build-84997 — selecting and specifying security

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Semiconductor devices. Micro-electromechanical devices - Test method for Poisson's ratio of thin film MEMS materials Ingestion-build-84997 — selecting and specifying security1 Scope This part of IEC 62047 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin film micro electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 m.