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G00300 - SEMI G3 - 仕様　側面ろう付け積層板 Revision:SEMI G3-90 - Inactive Water absorption (see SEMI G75

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Water absorption (see SEMI G75

previously published November 2003

and with scanning electron microscopy with energy dispersive x-ray spectrometry (SEM/EDX) to identify the elemental composition of the particles

本文書の目的は，半導体産業で使用されるシラン(SiH4)の仕様を提供するものである。

本ガイドラインは，ポジレジスト（positive photoresist）を意図している。

G00300 - SEMI G3 - 仕様　側面ろう付け積層板 Revision:SEMI G3-90 - Inactive Water absorption (see SEMI G75CurrentInactiveInactiveSEMI 7. 62 mm (0. 003 in.)10. 16 mm (0. 400 in.)15. 24 mm (0. 600 in.)22. 86 mm (0. 900 in.) Referenced SEMI Standards None.

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