D08000 - SEMI D80 - Test Method for Measurement of Water Vapor Transmission Rate for High Gas Barrier Plastic Film in a Short Time StdPbc-0524 SEMI F1 — Specification for

SEMI F1 — Specification for Leak Integrity of High-Purity Gas Piping System and Components

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SEMI D80-0421 (first published)

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適用 — 本安全ガイドラインは，半導体製品の製造，測定，組立て，およびテストに使用される装置に適用される。

D08000 - SEMI D80 - Test Method for Measurement of Water Vapor Transmission Rate for High Gas Barrier Plastic Film in a Short Time StdPbc-0524 SEMI F1 — Specification forHigh gas barrier property is required to plastic films for electronic devices such as flexible displays. The purpose of this Standard is regulation for determining the water vapor transmission rate of plastic film using a quadrupole mass spectrometer as detector. Determination of water vapor barrier property of plastic films with high gas barrier used for electronics devices such as flexible displays. Referenced SEMI Standards (purchase separately)