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Historical World Fab Report (2012 - 2023) StdTpc-Radio Frequency Identification (RFID) SEMI E114 — Test Method
Historical World Fab Report (2012 - 2023) StdTpc-Radio Frequency Identification (RFID) SEMI E114 — Test Method
$7700.00
Description
SEMI E114 — Test Method for RF Cable Assemblies Used in Semiconductor Processing Equipment RF Power Delivery Systems
<measured qualification parameter>
The mounting requirements in this Standard apply to the EUV exposure tools
NOTE 1: The design and fabrication of the sawing guides and the determination of any geometrical parameters is considered outside the scope of this Test Method
This Test Method provides a common basis for communication between manufacturers and users
Historical World Fab Report (2012 - 2023) StdTpc-Radio Frequency Identification (RFID) SEMI E114 — Test Method
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