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TEL Tokyo Electron 51161-802-001 Interface Block Robot IRAM Lithius w/300mm Fork Part No: 02-140301-02 Model No:

$20588.50

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Description

Part No: 02-140301-02 Model No:

please include all eBay item numbers

Range: 200 SCCM

Assembly Part No: 5087-403668-12

Part No: 080627

TEL Tokyo Electron 51161-802-001 Interface Block Robot IRAM Lithius w/300mm Fork Part No: 02-140301-02 Model No:TEL Tokyo Electron 51161 802 001 Interface Block Robot IRAM Lithius w 300mm Fork Part No: 51161 802 001 Model No: Interface Block Robotic Arm Main IRAM Removed from a TEL Tokyo Electron Clean Track Lithius System Made in Japan Installed Components NSK Robot Servo Motor Part No: M SSB020FN502 NSK Linear Stage Slide Part No: XY HRS025ZRS202 Parts List Assembly Part No: 5087 403668 12, IRAM (LITHIUS IPL), X AXIS 5080 192746 11: BASE,FORK IRAM XY P5179

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