E07700 - SEMI E77 - Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases Revision:SEMI E77-1104 (Reapproved 0815) - Superseded The system concept involves mating

The system concept involves mating a door on a cassette container to a door on an equipment canopy and transferring the cassette into

1  This Standard contains terminology and reference documents used in SEMI E49

and behavior identified in this Document

2  Final assemblies should be evaluated according to the criteria of SEMI S2 for environmental

as this information requires user input and is already specified by SEMI E58

E07700 - SEMI E77 - Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases Revision:SEMI E77-1104 (Reapproved 0815) - Superseded The system concept involves matingThe purpose of this Test Method is to quantify a nominal average conversion factor from one gas to another for a mass flow controller (MFC) and to quantify the conversion factor as function of flow for an MFC. This procedure describes a method to determine the MFC conversion factor and function between two gases. This Standard provides a common basis for communication between manufacturers and users. The intent of this Standard is not to suggest any