F10600 - SEMI F106 - Test Method for Determination of Leak Integrity of Gas Delivery Systems by Helium Leak Detector Revision:SEMI F106-0308 - Superseded if at present more than

if at present more than one standard test method for verification of a specific parameter exists (refer to Table 1)

and the specified orientation of the flat in the plane of the wafer surface

This standard was technically approved by the global Physical Interfaces & Carriers Committee

and example values necessary to build a comprehensive

The concentration of EL2 must be greater than 5 × 1015 cm−3

F10600 - SEMI F106 - Test Method for Determination of Leak Integrity of Gas Delivery Systems by Helium Leak Detector Revision:SEMI F106-0308 - Superseded if at present more thanThis Standard was technically approved by the global Facilities Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 30, 2012. Available at www. semiviews. org and www. semi. org in October 2012; originally published March 2008. This Document defines the inboard helium leak test method for gas delivery systems. It covers both conventional metal face sealing and surface mount gas