S02900 - SEMI S29 - フッ素系温室効果ガス（F-GHG）排出の特性評価と削減に関するガイド Revision:SEMI S29-0712 - Inactive SEMI P45-0306 (first published)

SEMI P45-0306 (first published)

1  This Standard encompasses the test methods for antifouling property and resistance to chemical reagents of the FPD polarizing films and its related materials

and completion of automated and manual carrier transfers to and from the equipment and

but also the reticles or mirrors to haze

The EUV Pod has the following components and subcomponents

S02900 - SEMI S29 - フッ素系温室効果ガス（F-GHG）排出の特性評価と削減に関するガイド Revision:SEMI S29-0712 - Inactive SEMI P45-0306 (first published)NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Environmental, Health & Safety Global Technical Committee2012618global Audits and Reviews Subcommittee20127www. semiviews. org www. semi. org NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to